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1

Fundamentals of Slurry Design for CMP of Metal and Dielectric Materials

Singh, Rajiv K., Lee, Seung-Mahn, Choi, Kyu-Se, Bahar Basim, G., Choi, Wonseop, Chen, Zhan, Moudgil, Brij M.

Journal:

Year:

2002

Language:

english

File:

PDF, 506 KB

english, 2002

2

Fundamental Study of Iodate and Iodine Based Slurries for Copper CMP

Lee, Seung-Mahn, Mahajan, Uday, Chen, Zhan, Singh, Rajiv K.

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 337 KB

english, 2000

3

Effects of Slurry Particles on Silicon Dioxide CMP

Choi, Wonseop, Abiade, Jeremiah, Lee, Seung-Mahn, Singh, Rajiv K.

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 2.11 MB

english, 2004

4

Estimation of Fractional Surface Coverage of Particles for Oxide CMP

Choi, Wonseop, Lee, Seung-Mahn, Abiade, Jeremiah, Singh, Rajiv K.

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 223 KB

english, 2004

5

Effect of Slurry Ionic Salts at Dielectric Silica CMP

Choi, Wonseop, Mahajan, Uday, Lee, Seung-Mahn, Abiade, Jeremiah, Singh, Rajiv K.

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 308 KB

english, 2004

6

Increased Copper Outplating from Dilute HF Solutions on Microstructurally Modified Silicon Surfaces

Chen, Zhan, Lee, Seung-Mahn, Singhz, Rajiv K.

Journal:

Journal of The Electrochemical Society

Year:

2000

Language:

english

File:

PDF, 365 KB

english, 2000

7

Dynamic Contact Characteristics During Chemical Mechanical Polishing (CMP)

Choi, Wonseop, Lee, Seung-Mahn, Singh, Rajiv K.

Journal:

MRS Proceedings

Year:

2003

Language:

english

File:

PDF, 124 KB

english, 2003

8

Effects of Particle Concentration in CMP

Choi, Wonseop, Lee, Seung-Mahn, Singh, Rajiv K.

Journal:

MRS Proceedings

Year:

2001

Language:

english

File:

PDF, 89 KB

english, 2001

9

Transient Electrochemical Measurements During Copper Chemical Mechanical Polishing

Lee, Seung-Mahn, Choi, Wonseop, Craciun, Valentin, Singh, Rajiv K.

Journal:

MRS Proceedings

Year:

2003

File:

PDF, 460 KB

2003

10

Fundamental Studies on the Mechanisms of Oxide CMP

Mahajan, Uday, Lee, Seung-Mahn, Singh, Rajiv K.

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 41 KB

english, 2000

11

Lateral Solid Phase Crystallization of Amorphous Silicon Under High Pressure

Lee, Seung-Mahn, Singh, Rajiv K.

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 1.43 MB

english, 1999

12

pH and Down Load Effects on Silicon Dioxide Dielectric CMP

Choi, Wonseop, Lee, Seung-Mahn, Singh, Rajiv K.

Journal:

Electrochemical and Solid-State Letters

Year:

2004

Language:

english

File:

PDF, 64 KB

english, 2004

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